Authors:-B. N. Shashikala, B. S. Nagabhushana, T. P. Deepa
Abstract:-Ti/Al and Ti/Al/Ni/Au ohmic contacts were deposited by electron beam evaporator on n type GaN and characterized by employing Scanning Electron Microscope. Effect of annealing temperature on the surface morphology of Ti/Al/Ni/Au and Ti/Al ohmic contacts were studied. Image processing techniques were used to study the surface morphology of Ti/Al/Ni/Au and Ti/Al ohmic contacts. Images were preprocessed before finding porosity. Using the MATLAB software, the porosity in the ohmic contact structures was found. The quantitative results were related to the fabrication process.
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