Journal of Research in Physics and Applied Sciences ISSN: 3139-1397 (Online)

Authors: JBV.Subramanyam, A. Rama Murthy, Sankar

Abstract: X-ray diffraction (XRD) and electron backscatter diffraction (EBSD) are commonly used to perform texture analysis of thin films. However, due to principle differences in data acquisition these techniques can yield disagreeing results. In this paper, we aim to highlight possible error sources with given examples for aluminum and copper thin films.

Keywords: Thin Films, EBSD, XRD