Authors: Raj Pal Setty , Sneha Chaudhary , Rupesh Mehta, Gyanendea Pathak
Abstract: Micro-Electro-Mechanical Systems (MEMS) have emerged as a key enabling technology in precision manufacturing, allowing enhanced measurement accuracy, process control, and automation. This paper reviews recent advancements in MEMS-based sensing technologies applied to precision manufacturing environments. Various MEMS sensor types, including accelerometers, gyroscopes, pressure sensors, and force sensors, are discussed with respect to their integration into manufacturing systems. The paper also highlights the role of MEMS in monitoring tool wear, vibration, and environmental parameters, contributing to improved quality control and reduced downtime. Challenges, such as sensor drift, packaging, and signal integration, are analyzed. The paper concludes with future trends in MEMSenabled manufacturing, including AI-assisted sensor networks and smart factories.
Keywords: MEMS, precision manufacturing, micro-sensors, tool monitoring, process control, industrial automation, sensor fusion
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